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Even as we enter the nanotechnology era, we are now encountering the 50th anniversary of the invention of the IC. Will silicon continue to be the pre-eminent material and will MooreTM's Law continue unabated, albeit in a broader economic venue, in the nanotechnology era? This monograph addresses these issues by a re-examination of the scientific and technological foundations of the micro-electronics era. By better assessing and understanding the past five decades of this era, it is proposed that a firmer foundation can be laid for the research that will ensue and possibly provide a glimpse of what is next to come in the nanotechnology era.