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This book contains a compilation of papers presented in Symposium T, Self-Organized Processes in Semiconductor Epitaxy, during the 2003 MRS Fall Meeting in Boston, Massachusetts. It also includes papers presented in joint sessions with Symposium N, Quantum Dots, Nanoparticles, and Nanowires, and Symposium Z, Progress in Compound Semiconductor Materials III - Electronic and Optoelectronic Applications. The goal of the volume is to address issues related to the understanding, control, and applications of several self-organized processes in semiconductor epitaxy, including strain-induced self-assembly; clustering, alloy phase separation and compositional modulation; and long- and short-range ordering. Topics include: morphological evolution - patterning and islanding; semiconductor nanostructure; quantum dots - ordering and patterning; III-V self-organized nanostructures; quantum dots and wires - structure, spectroscopy and transport; quantum dots and wires - devices; spins in semiconductor nanostructures; composition modulation and atomic ordering.