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Substantial progress has been demonstrated in developing thin-film-based II-VI, I-III-VI, and III-V semiconductors for photovoltaic (PV) devices. Success in these areas has also prompted research into thin (thickness < 20m) silicon solar cells. Thin-film PV devices require novel approaches to device design, deposition and growth techniques, and large-area uniformity coupled with low-cost requirements. This book addresses various issues in the design and fabrication of thin-film PV devices, deposition of semiconductors on low-cost substrates, nucleation and growth phenomena, interface and surface properties that influence film morphology and its structural, electrical and optical properties. The volume also addresses process issues such as impurity diffusion, interface degradation and changes in the electrical and optoelectronic properties of individual layers during device fabrication. Topics include: silicon-based thin films; II-VI-based thin films; III-V-based thin films and thin films - general.